Spin-on Dopant (SOD)
ACCUSPIN® B-150
Boron Spin-on Dopant
Please sign in to access more documents
Once signed in, you may be able to access additional documents for your account.
Overview
The ACCUSPIN B-XXX Spin-on dopant series are borosilicate (B-30, B-40, B-60) and boron nitrogen (B-75X, B-150) polymers designed for p-type base, isolation, p-type emitter diffusion, diode and deep p junction diffusion. The B-XXX series has been in large volume IC production for over 25 years. B-XXX can be applied using standard spin coaters.ACCUSPIN B-XXX materials provide a lower cost of ownership than other dopant sources and reduce the need for costly diffusion furnace tube cleaning or replacement, required when using gas or liquid boron dopants.Because the B-XXX materials are Spin-on borosilicates or boron nitrogen, diffusion is more uniform during the drive-in process so sheet resistance and junction depths are repeatable. The use of a Spin-on process eliminates non-uniformity issues due to changes in gas flows of boron sources and differing boron sheet resistance from placement in the diffusion furnace.A Spin-on process also increases diffusion furnace throughput because every wafer boat slot can be used for production wafers.
Sales Sheet
Name
Description
File Size
Date
Size
Polymers for all P-type diffusion
application/pdf 549.11 KB
10/31/2023
549.11 KB
Name
Description
File Size
Date
Size
Polymers for all P-type diffusion
application/pdf 549.11 KB
10/31/2023
549.11 KB
Name
Description
File Size
Date
Size
Product Number
Image
SKU
Description
102092
B150 125ml GLSBTL DE
102092
B150 125ml GLSBTL DE
Image
SKU
Description
102092
B150 125ml GLSBTL DE
102092
B150 125ml GLSBTL DE
