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Patterning Assistance Materials

Honeywell SLAM� 248

A silicon-rich BARC for damascene and other advanced patterning applications

Overview
  • Gapfill + Mask + BARC: Low CoO
  • First commercial SiBARC (130-5 nm)
Product Number
Image
SKU
Description
alt
101908
SLAM2482100200mm125L SG
alt
101908
SLAM2482100200mm125L SG
alt
104364
SLAM248210R5P 25L US
alt
104364
SLAM248210R5P 25L US
alt
107100
SLAM2483500300mm 125L US
alt
107100
SLAM2483500300mm 125L US
alt
107101
SLAM2482100300mm125LUS
alt
107101
SLAM2482100300mm125LUS
alt
31060940B
SLAM2481500200mm
alt
31060940B
SLAM2481500200mm
alt
31060950B
SLAM2482100200 mm
alt
31060950B
SLAM2482100200 mm
alt
31060980B
SLAM248 Parent
alt
31060980B
SLAM248 Parent
alt
31060990B
SLAM2481500300mm
alt
31060990B
SLAM2481500300mm
alt
31061010B
SLAM2482100300mm
alt
31061010B
SLAM2482100300mm
alt
89114
SLAM2483500200mm NPFOS
alt
89114
SLAM2483500200mm NPFOS
Image
SKU
Description
alt
101908
SLAM2482100200mm125L SG
alt
101908
SLAM2482100200mm125L SG
alt
104364
SLAM248210R5P 25L US
alt
104364
SLAM248210R5P 25L US
alt
107100
SLAM2483500300mm 125L US
alt
107100
SLAM2483500300mm 125L US
alt
107101
SLAM2482100300mm125LUS
alt
107101
SLAM2482100300mm125LUS
alt
31060940B
SLAM2481500200mm
alt
31060940B
SLAM2481500200mm
alt
31060950B
SLAM2482100200 mm
alt
31060950B
SLAM2482100200 mm
alt
31060980B
SLAM248 Parent
alt
31060980B
SLAM248 Parent
alt
31060990B
SLAM2481500300mm
alt
31060990B
SLAM2481500300mm
alt
31061010B
SLAM2482100300mm
alt
31061010B
SLAM2482100300mm
alt
89114
SLAM2483500200mm NPFOS
alt
89114
SLAM2483500200mm NPFOS

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